Graphite Heater For PVD Coating
High-purity graphite heating element for PVD coating chambers. Low outgassing, ash content <50 ppm, operating temperature to 1600ยฐC. Compatible with Hauzer, Oerlikon, Sulzer and custom PVD systems.
Graphite resistance heaters for physical vapour deposition (PVD) coating chambers demand extremely low outgassing and high purity to avoid contaminating the coating process. Our PVD heaters are machined from high-purity isostatic graphite with ash content below 50 ppm, minimising volatile impurities at operating temperature. The elements are cleaned and vacuum-baked prior to delivery. Mounting interfaces and electrical connection geometry are machined to match chamber specifications.
Applications
- Vacuum heat treatment furnaces โ hardening, brazing, sintering
- CVD/CVI processing systems
- PVD coating chambers
- Semiconductor crystal growth furnaces (CZ, FZ)
- Solar ingot casting furnaces
- Atmosphere sintering furnaces (Hโ, Nโ, Ar)
- High-temperature laboratory equipment
Compatible Furnace Brands
Ipsen · ALD Vacuum Technologies · SECO/WARWICK · ECM Technologies · Gasbarre · Solar Manufacturing · Shimadzu · Nabertherm · Schmetz · BMI Fours
Why Expo Advanced Materials
- TOYO TANSO Japan authorised partner โ premium isostatic graphite grades with full raw-material traceability
- Qualified supplier to SECO/WARWICK โ supplying graphite components to their global vacuum furnace operations
- Full material test certificate (MTC) + dimensional inspection report with every shipment
- Custom machined to your DXF, STEP, PDF or IGES drawings within 2โ4 weeks
- ISO 9001:2015 certified | Export to 30+ countries | 24-hour quote turnaround
| Material | High-purity isostatic graphite (TOYO TANSO grade) |
| Max operating temp | 1600ยฐC (PVD chamber); 2200ยฐC (inert/vacuum) |
| Density | 1.78โ1.85 g/cmยณ |
| Ash content | <50 ppm standard; <20 ppm on request |
| Flexural strength | 45โ60 MPa |
| Electrical resistivity | 10โ15 ฮผฮฉยทm |
| Thermal conductivity | 80โ120 W/mยทK |
| CTE | 4โ5 ร 10โปโถ/K |
| Tolerance | ยฑ0.01 mm standard |
| Pre-delivery treatment | Vacuum cleaned and baked |
| HS Code | 6815.10 |
